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The leak detection role of helium in semiconductors

The leak detection role of helium in semiconductors

To prevent the performance degradation of semiconductor devices, integrated circuits, and other components due to surface contamination from moisture and other impurities, sealing with a shell is necessary. However, small holes that are difficult to detect with the naked eye often occur at the sealing points of the shell or at the lead connection points due to various reasons. Therefore, after the component is packaged, certain methods are required to detect the presence or absence of these small holes. Helium leak detection uses helium gas to check for small holes in the shell of the electronic component package. Because helium atoms are very small and easily pass through small holes into the shell, this detection method can detect very small holes (i.e., it can detect holes with a leak rate of approximately 10−11～10−12cm3/sec), with a sensitivity comparable to that of radioactive leak detection, but simpler than radioactive leak detection. Helium leak detection test method: First, place the packaged components in a container filled with helium gas and pressurize it, allowing the helium gas to enter the shell through the small holes; then take it out and use compressed air to blow away the residual helium gas on the shell surface; then use a mass spectrometer to detect the helium gas leaking from the shell surface.

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2025

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Common helium leak detection methods for helium mass spectrometer leak detectors include the helium hood method and the spraying method

Common helium leak detection methods for helium mass spectrometer leak detectors include the helium hood method and the spraying method

The helium hood method involves enclosing the test piece with a test hood. Before leak detection, the air inside the hood is removed, and then 100 kPa of helium is introduced. When the leak detector output shows a change, it indicates that the test piece under the helium hood has a leak. The test hood can be made of plastic film. For large quantities of small parts, a dedicated rigid test hood can also be made, allowing the pressure of the introduced leak detection gas to be higher than 100 kPa to improve the leak detection sensitivity.

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2022

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